Indandatho yokugxilisa i-silicon ye-monocrystalline iyisici esibalulekile sedivayisi yokucubungula i-plasma, esetshenziswa ikakhulukazi emkhakheni wokukhiqiza ama-semiconductor. Ithuthukisa ukufana kokugawulwa nokunciphisa ukubeka emuva ngokuzungeza umngcele we-wafer.
Izinzuzo: ① Isakhiwo se-monocrystalline sinezinkinga ezimbalwa, amandla omshini aphezulu, nokumelana okungcono kakhulu nokuhlaselwa yi-plasma uma kuqhathaniswa nezinto ze-polycrystalline
② Ukuqedwa kobuso kungafinyelela ezingeni le-nanometer, kuvimbele ukulahleka kwezinhlayiya nokungcola kwe-wafer
③ Izinga eliphezulu lokufanisa phakathi kwezinga lokunweba ngenxa yokushisa kanye ne-wafer, okwenza kube lula ukugoba ngaphansi kwezinqubo zokushisa okuphezulu