Indandatho yokugxilisa i-monocrystalline silicon iyisici esibalulekile sedivayisi yokucubungula i-plasma, esetshenziswa ikakhulukazi emkhakheni wokukhiqiza ama-semiconductor. Ithuthukisa ukufana kokugawulwa nokunciphisa ukubeka emuva ngokuzungeza umngcele we-wafer.
Izinzuzo: ① Isakhiwo se-monocrystalline sinezinkinga ezimbalwa, amandla amakhulu emishini, nokumelana okungcono kakhulu nokuhlaselwa kwe-plasma uma kuqhathaniswa nezinto ze-polycrystalline
② Ukuqedwa kobuso kungafinyelela ezingeni le-nanometer, kuvimbele ukulahleka kwezinhlayiya nokungcola kwe-wafer
③ Isilinganiso esiphezulu sokufana phakathi kwe-thermal expansion coefficient ne-wafer, okwenza kube lula ukugoba ngezinhlelo zokushisa okuphezulu