Product Introduction
This equipment is a high-temperature vacuum debinding and sintering integrated furnace specifically developed for the aluminum nitride ceramic substrate industry, integrating debinding and sintering functions. It adopts a double-layer water-cooled vacuum shell structure, combined with graphite multi-zone independent temperature control heating, supporting both vacuum debinding and partial pressure debinding modes. The gas system adopts a multi-channel laminar design, which can significantly improve the debinding and degassing effect, making it the preferred equipment for aluminum nitride substrate sintering processes.
Technical Features
Shell structure: Double-layer water-cooled vacuum shell, high cooling efficiency, good airtightness
Heating method: Graphite heating elements, multi-zone independent temperature control, strong temperature field controllability
Debinding modes: Supports both vacuum debinding and partial pressure debinding modes, high process flexibility
Gas path design: Multi-channel laminar gas structure, uniform airflow distribution, more thorough degreasing
Product Advantages
Strong specialization: Developed for the process characteristics of aluminum nitride substrates, high matching degree
Integrated design: Debinding and sintering completed in the same equipment, reduces material transfer, improves efficiency
Dual debinding modes: Flexible selection of vacuum or partial pressure debinding, adaptable to substrates of different formulations and thicknesses
Uniform temperature field: Multi-zone independent temperature control, ensures batch consistency of substrates
Excellent degreasing effect: Laminar multi-channel gas path, avoids local carbon deposition, improves yield
