Slit Coater:
• This equipment is a specialized device developed and designed for coating photoresist on glass substrates.
• The substrate is transferred to the coating platform using a robotic arm. A precision coating head uniformly applies the adhesive onto the substrate with precise liquid dispensing from a plunger pump. Then the robotic arm transports the coated substrate to downstream equipment.
➢ Institutional composition:
1.Main frame
2. Marble Base
3. Substrate Platform
4.Blade Holder Travel Mechanism
5. Blade Holder Lifting Mechanism
6.Adhesive Coating System
7.Exhaust fans
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Specification Item /Items |
Parameters/Parameter |
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Power Voltage Power |
AC200 V 50/60 Hz 3Phase AC200 V 50/60Hz 3 Phase |
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Substrate Type Substrate |
Glass substrate, organic substrate, ceramic substrate, etc. Glass, Organic, Ceramic Type Substrate, and so on |
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Substrate Size (mm) Substrate Size |
100 x 100 - Generation 8(Standard model500*600) 100 x 100 - Up to Generation 8 Size(500*600 Standard Model) |
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Coating Material Type Coating Material |
Photosensitive materials, protective films, insulating materials, etc. Photosensitive Coating Materials |
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Liquid viscosity (cps) Viscosity (cps) |
3 ~30(Standard). Other viscosities can also be proposed. We propose the system viscosity other than above. |
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Dispensing/Coating Method Extrusion Method |
PrecisionREGElectronic control pressurization method Pressurized Supply |
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Equipment Configuration Tool Configuration |
1. Coating Head Slot Die |
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2. Coating Head Travel Axis (Servo Driven) Slot Die Linear Drive Unit |
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3. Coating head lift (servo driven) Slot Die Servo Drive Lift Unit |
