isiZulu
Kwadalwa ngo 09.09
Amasistimu Okulethwa Kwegesi Ye-UHP Ezindaweni Zokwakha Ama-Semiconductor: Kungani I-EP Tubing Ibalulekile
Kungani Izinhlelo Zokulethwa Kwegesi Ye-UHP Zibaluleke Kangaka?
Ekukhiqizeni ama-semiconductor—izinqubo ezifana nokugqobhoza, i-CVD, ukufakwa kwe-ion, ne-lithography—amagesi enqubo kufanele abe ne-ultra-high purity, ngokuvamile angu-99.9999% (6N) noma ngisho angu-99.99999% (7N). Ngisho nokungcola okuncane kakhulu ezingeni le-ppb (izingxenye eziyizigidi ezingu-1,000,000,000) noma i-ppt (izingxenye eziyizigidi ezingu-1,000,000,000,000)—njengomswakama noma umoya-mpilo—kungabangela ukukhubazeka okubulalayo njengokuncipha kwe-gate oxide, izikhala zensimbi, noma amasekhethi amafushane kuma-wafer, okungase kulahle konke ukukhiqizwa.
Umsebenzi wohlelo lokulethwa kwegesi ye-UHP ngakho-ke ukuthutha amagesi kusuka emthonjeni kuya ethuluzini lenqubo ngaphandle kokuncipha kobumsulwa, kuvinjwe kokubili ukungcola nokuvuza kuzo zonke izindawo.
Kungani i-EP Tubing Iba Umhlathi Wohlelo Lwe-UHP?
Ithumbu le-EP (Electropolished) lenziwe ngensimbi engagqwali edlula enqubweni yokucwenga nge-electrochemical, okukhiqiza ingaphakathi elifana nesibuko. Lokhu kuyenza ibe yi-"umthambo" ongenakushintshwa wokusabalalisa igesi ye-UHP.
Ukuhlanzeka Okuphelele – Ukuvimbela Emthonjeni
Ukucutshungulwa kwe-EP kunciphisa ukuqina kwangaphakathi kwendawo (Ra) kuye ku-0.13 µm – 0.25 µm noma ngisho ngaphansi. Lokhu kuqedwa okubushelelezi kakhulu kususa izikhala ezincane kanye nezindawo zokunamathela, kungashiyi ndawo yokuthi izinhlayiya, ama-ion ensimbi, noma umswakama unamathele.
Ukumelana Nokugqwala Okuthuthukisiwe – Ukulondolozwa Kobumsulwa
Isinyathelo sokucwenga nge-electropolishing sisusa ukungcola kwendawo futhi sakhe ungqimba oluvikelayo olucebile nge-chrome-oxide, okuthuthukisa kakhulu ukumelana namagesi agqwalayo afana ne-Cl₂, CF₄, ne-HCl. Lokhu kuvimbela ukugqwala kodonga lwepayipi okungakhiqiza izinhlayiya noma ukungcola okukhipha umoya.
Ukuthuthukiswa Kokugeleza Kahle & Ukuhlanza Ngokushesha
Udonga lwangaphakathi olushelelayo lunciphisa ukumelana nokugeleza futhi lusheshisa ukuhlanza kwesistimu nokushintshwa kwegesi. Ezinqubweni ezidinga ukushintshwa kwegesi ngokushesha, lokhu kunciphisa izikhathi zomjikelezo futhi kwandisa ukusebenza kwefab.
Into Ephakeme – Izinga le-“Crown”
Amashubhu e-EP ekhwalithi ephezulu enziwa nge-316L VIM-VAR (Ukuncibilikisa nge-Vacuum Induction + Ukuncibilikisa nge-Vacuum Arc) insimbi engagqwali. Le nqubo yokuncibilikisa kabili iqinisekisa ukuhlanzeka okuphelele kwensimbi eyisisekelo, okuyisisekelo esibalulekile sokufeza ukusebenza okuphezulu kwe-EP.
Izimo Zokusetshenziswa Eziyinhloko
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Izinqubo Eziyinhloko – Ukulethwa kwamagesi asebenzayo ahlanzekile kakhulu okusetshenziselwa ukugcoba, i-CVD, ukufakwa kwe-ion, kanye ne-lithography.•
Amagesi Akhethekile – Ukuphatha ngokuphephile amagesi avuthayo, anobuthi, noma agqwalayo njenge-SiH₄, PH₃, Cl₂, ne-BCl₃. Emagesini ayingozi kakhulu, amashubhu e-EP avalelwe kabili avame ukusetshenziswa (ishubhu langaphakathi elomoya, ijazi langaphandle likhishwe noma lifakwe i-nitrogen ukuze kuqashwe ukuvuza).•
Ama-Hardware Abalulekile – Asetshenziswa kumaphaneli okusabalalisa amagesi (ama-VMB), amakhabethe egesi, kanye nokuxhunywa kwamathuluzi enqubo lapho izindawo zangaphakathi ezihlanzeke kakhulu ziyimpoqo.
Ngaphandle Kwamashubhu: Ezinye Izinto Ezibalulekile Ohlelweni Oluphelele Lwe-UHP
Ukuqinisekisa ubuqotho obuphelele, uhlelo kufanele futhi lufake:
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I-Welding ye-Orbital Ezenzakalelayo Ngokuphelele – Yenziwa kuma-cleanroom e-ISO Class 5 (Class 100) noma ezingcono, kuqedwe ukuhluka kwe-welding yezandla kanye nezingozi zokungcola.•
Izinto Zokuxhuma Ezingenalutho Ezine-Face-Seal Yonke-Insimbi – Njengezinhlobo ze-VCR® noma i-W-Seal, ezincike kuma-gaskets ensimbi ukuze zisebenze ngokungavuzi.•
Ukuhlanza Okunzulu Nokupakisha – Amashubhu e-EP ngokuvamile ahlanzwa ngamanzi angenasihlanu esiphezulu, omiswe, futhi akhishwe nge-nitrogen ngaphambi kokufakwa emabhaguni amabili ekupakisheni kwe-cleanroom ukuze kugcinwe ukuhlanzeka kwawo "njengoba kuthunyelwe" kuze kufike ukufakwa.
I-EP tubing ayiyona nje ipayipi—iyindawo yokuqala yokuzivikela ekuhanjisweni kwegesi ye-semiconductor. Ubuso bayo obushelelayo kakhulu, ukumelana nokugqwala okuphezulu, kanye nokuhlanzeka kwezinto eziphezulu kuthinta ngqo isivuno se-wafer, ukuthembeka kwedivayisi, kanye nenzuzo yefab iyonke. Emhlabeni wama-node angaphansi kuka-5nm kanye nezabelo zezinkinga eziqinile, i-EP tubing ayiyona into ozikhethela yona—iyisisekelo.
Othintwayo
Shiya imininingwane yakho futhi sizokuthinta.